The NRG is an interdisciplinary and collaborative team of faculty, students, scientists, and engineers working on the development and application of ultrathin silicon membrane technologies.
Square Chip with 5 Membrane Slots
Goergen Hall at Dusk (UR)
TEM of pnc-Si
AJA Deposition System
6″ Wafer with > 500 membrane chips
Close up of wafer back side
Porous nanocrystalline silicon (pnc-Si) is the molecularly thin nanoporous membrane material that started it all, but NRG scientists now make a variety of materials including non-porous and microporous membranes. The common characteristic of our membranes is that they are made from silicon and have a nanoscale thickness.
Utrathin membranes are exceptionally permeable to gases, fluids, and diffusing species. The physical characteristics of our materials such as pore sizes, thickness, and surface charge, are readily obtain through measurements. The membranes are surprisingly robust and the silicon platform enables device integration and scalable manufacturing.
Our membranes have been used as cell culture substrates, as chemical sensors, and as separation tools for nanoparticles and biological materials. We are now integrating membranes into devices that combine microfluidics, electronics, and sensors. We are also developing high area membranes for applications in dialysis and membrane arrays.