The schematic of the slot device is shown below. The main support structure is the pnc-Si membrane with Au or Ag metal on both sides. There is a conformal covering of Alumina shown in blue in the figure which actually…

The CHA e-beam evaporator in RIT had been used traditionally for the deposition of metal on the pnc-Si membranes. The most important factor for metal deposition on the membranes is that the nanoholes must not be blocked. So the metal…