Product | Pore Size | Thickness | Transparency | Pore Density | Porosity | Diffusive Permeability |
NPN | 60 nm | 100 nm | Glass-like | 1 x 10¹º cm⁻² | 20 % | 0.1 cm/sec |
Dual Scale | 60 nm and 3 μm | 100 nm | Glass-like | 1 x 10¹º cm⁻² | 25% | > 0.1 cm/sec |
SiN | 0.5 μm | 400 nm | Excellent | 1 x 10⁸ cm⁻² | 5%, 20% | 0.03 cm/sec |
G-Flat™ Oxide |
0.5 μm 8 μm |
300 nm | Excellent | 1 x 10⁸ cm⁻² | 5%, 20% | 0.03 cm/sec |
Key
NPN – Nanoporous silicon nitride
Dual Scale – NPN with micropatterned 3 micron pores
SiN – Microporous silicon nitride
G-Flat™ Oxide – Microporous glass