A long time ago, Charles did Asymmetrical Oxide Experiment to test how the asymmetrical oxide affects the pores, see Asymmetrical Oxide Experiment. He deposited three structures, which were 40/15/40, 40/15/20 and 20/15/20. It showed that when the thickness of top…

Recently I did some further research on the agglomeration in SiO2+Si layers. On my first post about agglomeration,I found that after annealing at 1000ºC for 1 min without susceptor, 15nm thick Si layer agglomerated and the average diameter of agglomeration…

It seems that pores are only formed in the “sandwich structure” on certain process. So in order to verify this conclusion, I annealed two layers structure (20nm sio2+15nm si) to test the agglomeration theory. The other parameters in depositing and…

In order to figure out the relationship between grain size and pore size, I tried to use XRD measurement to determine the grain size by Scherrer equation. t = kλ/(B cosθ) where t is the average grain size, k is…