The electrical properties of 20nm and 50nm thick sputtered oxide is currently being investigated. Capacitance-Voltage (C-V) and Current-Voltage (I-V) tests are achieved by fabricating 200um-4kum diameter capacitor “dots”  using Lesker SiO2 targets and flash-evaporated aluminum (CVC). A GCA stepper is…

A study of membrane deflection has been conducted using the Veeco Wyco optical profiler. This is the first time the Veeco has been used to obtain quantitative data describing membrane deflection. This type of analysis will be useful for several…

JMP7 statistical software was used to perform a Tukey-Kramer analysis on both burst pressure (psi) and air permeability for membranes fabricated on 200um and 400um wafers. This data has been collected from a spreadsheet that is maintained by Karl and…

An initial experiment for membrane deflection characterization using an optical profiler (Veeco Wyco) has been performed. Below are some of the images taken with the tool: (a image was taken at each 0.5 psi interval): Once we get a pressure…

I have uploaded the TEOS process outline: TEOS is tetra-ethyl-ortho-silicate, or equivalently tetra-ethoxy-silane. TEOS slowly hydrolyzes into silicon dioxide and ethanol when in contact with ambient moisture. IMPROVEMENTS: -This process prevents us from having to expose the front-side of the…

An important result of last weeks experiment showed that Antimony (Sb) doped substrates had no pinhole defects; however, Phosphorous doped substrates from the same batch had many very small pinholes. This agrees with a previous experiment: Antimony wafers have shown…

Process Summary for the week of 12/3 -12/10/2007: Simpore Process Flow.xls JP