This past year I have been collecting burst pressure data on pnc-Si and NPN. The data for 30nm pnc-Si came from my previous post, “Wafer 1059: Burst Pressure Analysis”, which also includes a wafer map. This wafer had 7% porosity and…
This past year I have been collecting burst pressure data on pnc-Si and NPN. The data for 30nm pnc-Si came from my previous post, “Wafer 1059: Burst Pressure Analysis”, which also includes a wafer map. This wafer had 7% porosity and…
The following data is from analysis of Wafer #1059, consisting of 30nm pnc-Si with 7% porosity and an average pore diameter of 28nm. Square window sizes with sides lengths of 0.1mm, 0.3mm, 0.5mm, 0.7mm, and 0.9mm were tested. For 1.1mm…
This is a follow up to Josh’s post, “Continued Au Separations with SiN-NP wafer #’s 1029 and 1030”, and seems to explain why we initially got an S value greater than one during our gold separations. We conducted tests to…
This is a follow up to my previous post, “Burst Pressure Probability II”. I burst 111, 30nm thick single window pnc-SI TEM chips of ten different window sizes, to measure the burst pressure of chips with varying dimensions. Although area is a…
This is a follow up to Mohammad’s previous posts: “Burst Pressure”, and “Burst Pressure Probability”. Josh and I had Mohammad’s wafer remade, and burst several 30nm thick pnc-Si TEM chips to add to Mohammad’s earlier data. Pore size still needs to…
Permeance Testing Sepcons were built with 500 nm 5-slot chips. Permeance tests were performed on Samples A-C. Nitrogen gas was pushed through the membrane at a given pressure, and the height on the flow meter tube (green graduated column pictured…