I only added coordinates on each data point.

Production this week focused on varying the RTP temperature of membranes deposited under identical conditions. wafer 316 – 800 C RTP (120 s) (0,-5) @ 50 kx Material still appears to be amorphous. Wrinkled at edges. wafer 318 – 900…

These are the graphs with burst pressures for wafers 187, 189, 310, 312 and updated burst pressure bookMembrane_Burst_Book.xls The orange columns in the graphs indicate samples that I used for air permeability tests before.

Below are results for air permeability tests I took on wafers w302, w304, w187, w189, w310. The X axis is the position of a sample on the wafer (from inside to outside).Samples form wafer 189 passed no air and the…

This week I tried to run a few “eq-tests” with some samples from wafer 187 to get some hydraulic permeability value for our membranes to see how they compare to the polymer filters used in the microcon and nanosep systems.…

I’ve been doing some reading, and came across this article by researchers at Sandia Nat’l Labs. They are looking at the stress evolution in thin films, and have observed “nanovoids” in their amorphous silicon. Here is a cross-sectional TEM image…

This week I set up some diffusion experiments with the inner membranes of wafers 187 and 310. From the TEM images posted previously, we see that these inner membranes have what appear to be either very small pores or small…

Link to “A closer look at separations” We recently bought purified proteins that I will use to build a molecular weight ladder for membrane separations. I initially dissolved these proteins in salt solution and spun in an ultracentrifuge to remove…

An important result of last weeks experiment showed that Antimony (Sb) doped substrates had no pinhole defects; however, Phosphorous doped substrates from the same batch had many very small pinholes. This agrees with a previous experiment: Antimony wafers have shown…

This week’s production included wafers of antimony (Sb) and phosphorus (P) doping. Process parameters The deposition heater was re-brazed prior to this deposition. We were concerned with the original brazing job because there were areas with “globs” of material and…