There is a reliability/handling issue with the single slot chips. 0.5 mm x 10 mm slots, 20 nm thick membranes with 40 nm SiN reinforcement. The membranes are easily packaged in an upper fluidic PDMS layer with inlet/outlets and two…
There is a reliability/handling issue with the single slot chips. 0.5 mm x 10 mm slots, 20 nm thick membranes with 40 nm SiN reinforcement. The membranes are easily packaged in an upper fluidic PDMS layer with inlet/outlets and two…