Introduction & Background Parylene is a polymer stemming from the chemical-vapor-deposited poly(p-xylylene) group. This polymer treatment is applied as a gas which allows complete and uniform coatings of substrates with even nanoscale features. Parylene treatment is widely used as it…
Tag: permeance
Updated: 25-40-25 nm OSO SEPCONS
We created a 25-40-25 OSO stack with a SEPCON pattern. RTP at 1050 C 100 C/s 60 s. The following images show a comparison between the STEM detector and the SEM detector, and then a couple more images at 100…
Burst Pressure, Permeance of NSN pnc-Si SEPCONS with large pores
Karl, Charles and I measured the burst pressure and permeance of some 30-50-30 and 30-100-30 NSN. Burst Pressure: The SEPCONs readily burst at pressures under 1 psi when the flow was directed from the backside of the chip through the…
