In this post, two unique five-layer structures will be discussed. The first five-layer structure is nitride/oxide/silicon/oxide/nitride (NOSON) with the deposition order from bottom to top. In this structure, the silicon film is 25nm while the nitride and oxide are both…
Category: NRG
High temperature deposition of NSN and OSO stacks
In this post, we’ll discuss a little bit about how would the deposition temperature affect the pore formation and pore morphology. I first show some previous results of the effect of deposition temperature on the porosity and pore size from…
Posted in NRG
f-BSA adsorption on Functionalized pnc-Si (Shestopalov Lab)
Katia in Dr. Shestopalov’s Lab functionalized some pnc-Si windowless chips. The process she follows is shown in Figure 1. She provided chips at various stages of the process. “Grignard”, “Diazirine”, and “PEG”. After functionalization, the chips were wetted with…
SU8 lift-off characterization
Etch Rate in BOE 10:1 Thermal Oxide TEOS PECVD Oxide LTO Sputtered 10:1 BOE at 20C 66 nm/min 266.4 nm/min > 180 nm/min * Each oxide type was placed in BOE w/ surfactant for 10 seconds, then the rate per…
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BBB Device V2.6
Given the results of my previous post, I am reworking my design to make it more manufacturable. BBB Device V2-6 Compressed The major change compared to my last design is the inclusion of a full length microscope slide and…
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Autoclaved BBB Device V2.5
To prepare the BBB devices for cell culture, they must be sterilized. To that end, I wanted to see if there were any adverse effects from autoclaving the device. Recipe 4 on the U of R autoclave is a dry…
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NSN SEPCONs
Still trying to reproduce Joe’s large pore material on SEPCONs using NSN stacks. This post has data from two wafers with 30/50/30 and 30/100/30 NSN. RTP is 1000C 50C/s for 1min. Nitride is etched off by placing samples in 50%…
More Barcikowski bioconjugates have arrived. Here’s the plan for them.
The Barcikowski lab sent us generous amounts of three different samples – gold, platinum, and bioconjugated gold. Each of the samples was created via laser ablation, resulting in fairly polydisperse (4-50nm diameter) nanoparticles for the pure metal and significantly less…
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Shear-free chemotaxis in action
Hi all, this report will serve both as an update and a template for my upcoming BMES 2012 poster on the shear-free chemotaxis system. Introduction: Because of its capability in hosting reactions and transporting materials in small volumes, microfluidics enables…
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Nano-porous Lift-off Mini-update
New Lift-off setup, thanks to suggestions and concerns about flatness of the membrane after lift-off. Floating SU8 – SiN membrane with superstructure submerged. Membrane after removal from water Membrane, dry on first version of lift-off super structure. Membrane after…
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